The system is designated to equip vacuum technological plants for deposition of coatings with sputtering units of different type (magnetron, arc, thermal, electron-beam, etc.). The usage of the system is especially effective in the technology of creation of sophisticated optical coatings (antireflection, reflection, interference light filters), its informing possibilities surpass much the possibilities of the known systems of control of a coating reflection coefficient on the fixed wave length of the systems of control of a coating thickness (for example, on piezoelectric transducers).
The system is designated, first of all, to control the spectral coefficient of reflection of samples surface (products, certifier) moving during the process of deposition of film coatings with assistance of the devices go-round or linear type (or immovable). As the basic information there is a diagram on the computer monitor display in the real time showing dependence of a coating reflection coefficient (in %) on a wave length within the limits of the working spectral range. The system also provides the express after-work control and registration (with outlet of the results on the printer) of the reflection of the spectrum and the spectrum of transparency of a produced coating.
The device uses the standard SL 40 polychromator.
The software of the system allows: to adjust and to trim the system, to control samples reflection coefficient in the whole working range by way of diagrams in the real time, to compare a registrated spectral characteristics during the process with the characteristics of the best product (or standard). The programme also provides the express control after the operation and the registration of the reflection spectrums and the light transmission spectrums of a produced coating, to preserve, to look through, to process and to print the results of control.
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