Vacuum chambers are made of structural materials, including stainless steel, with a wall thickness of up to 12 mm (for round chambers). The chamber has a number of technological elements located on the walls of the vacuum chamber:
- Flanges,
- Rotation inputs,
- Viewing windows,
- Sensors,
- Shutters, etc.
Cooling of the vacuum chambers is carried out in a labyrinth way or with the help of a water jacket.
The inner surface of the vacuum chamber is processed mechanically to the required roughness in order to ensure a given minimum flow of gas evolution. To obtain a minimum gas evolution flow, the inner walls are outgassed by tubular electric heaters made of stainless steel. After manufacturing, the product is checked for tightness with a helium leak detector.
Vacuum chambers can be manufactured both according to our own developments and according to the design documentation of the Customer.